- Ruhr-Universität Bochum

Infrastructure

Production

3D SLA

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Specifications:
- Building space 145x145x185 mm
- resin layer thickness: 50-100 µm
- Laser power: 250 mW
- Laser wavelength: 405 nm
Application:
- Rapid Prototyping
- Production of individual components / spare parts for test rigs
- Materials (directly available): Standard PLA resin (white), ceramic resin
- All other Formlabs resins can be procured and processed
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Additive manufacture

Bearbeitungsstation Trump Lasma
Location: RUB, ID
Group: LAT
Contact: Prof. Dr.-Ing. habil. Andreas Ostendorf
Email: sekretariat-lat[at]ruhr-uni-bochum[dot]de
DMG Mori SLM 125
Location: RUB, ID
Group: LAT
Contact: Prof. Dr.-Ing. habil. Andreas Ostendorf
Email: sekretariat-lat[at]ruhr-uni-bochum[dot]de
Orlaser ORLAS Cube
Location: RUB, ID
Group: LAT
Contact: Prof. Dr.-Ing. habil. Andreas Ostendorf
Email: sekretariat-lat[at]ruhr-uni-bochum[dot]de

Advanced Silicon Etching

Oxford PlasmaPro Estrelas 100
Location: RUB, ZGH
Group: ZGH
Contact: Dr.-Ing. Dennis Naujoks
Email: dennis[dot]naujoks[at]ruhr-uni-bochum[dot]de

ALD Reactor

F-120 -ALD Reactor (ASM)
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Argon inert gas lines

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Bonder

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Specifications: ultrasound ball wedge or deep access wedge
Location: RUB, ID
Group: PTT
Contact: Prof. Martin R. Hofmann
Email: ptt+office[at]rub[dot]de

Chemical vapor deposition or synthesis

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Specifications:
- Synthesis from the gas phase
- Capable of preparing small nanoparticles with homogeneous size distributions
- Often use organometallic compounds as precursor
- Typically low catalyst loadings
- Not easy to scale up
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

Coater

Coatema Easycoater
Location: RUB, ID
Group: LAT
Contact: Prof. Dr.-Ing. habil. Andreas Ostendorf
Email: sekretariat-lat[at]ruhr-uni-bochum[dot]de

Convection oven

THERMCONCEPT KU 15/06/A
Specifications:
- Program controller: Eurotherm 3208
- Maximum temperature: 650 °C
- Heating capacity: 2.4 kW
- Heating method: Heating elements
- Interior space (WxHxD): approx. 300x150x350 mm (approx. 15 litres)
Application: The convection oven is suitable for drying samples and for heat treatment at low temperatures (tempering)
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Cutting machine

Brilliant 240
Specifications: Manufacturer: QATM GmbH
- Cutting disc: up to 254 mm/10''
- Max. sample size: Ø 95 mm
- X-axis (travel cut) automatic & manual: 225 mm, Y-axis (cross cut) manual: 170 mm, Z-axis (parallel cut) automatic (optional): 120 mm
- Table without Z-axis: WxD 380 x 270 mm
- Table with Z-axis: WxD 300 x 270 mm
- Positioning accuracy Z-axis: 0.1 mm
- Groove width: 12 mm
- Speed: 3015 rpm at 50Hz and 3100 rpm at 60Hz
- Connected load: 5.5 kVA
- Drive power (main drive): 3 kW, S1; 4 kW, S3/60%
- WxHxD: 925x676x756 mm
- Weight (depending on equipment): ~ 130 Kg
Application: Fast and precise cutting of workpieces and samples for the following metallographic examinations
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de
Brilliant 265
Specifications:
- Manufacturer: QATM GmbH
- cutting wheel: up to Ø 406 mm/16"
- Max. sample size: Ø 150 mm
- X-axis (travelling cut) automatic: 345 mm, Y-axis (cross cut) automatic: 200 mm, Z-axis (parallel cut) manual or automatic (optional): 150 mm
- positioning accuracy Z-axis: 0.1 mm
- groove width: 12 mm
- speed: variable
- Power: 17 kVA
- Drive power (main drive): 7 kW, S1
- BxHxD: 1100x1610x930 mm
- Weight (depending on equipment): 480Kg
Application: Fast and precise cutting of workpieces and samples for subsequent metallographic examinations
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

CVD reactor

AIX-FE-200 (Aixtron) CVD reactor
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de
AIX-RF-200 (Aixtron) CVD reactor
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

EDS

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Specifications:
- Energy of the capacitors: 80 kJ
- Compression time: approx. 5 ms
- Current strength: up to 300 kA
- Maximum compression force: 110 kN
- Sample geometry: cylindrical samples ( Ø 19 mm)
Application: Forming of electrically conductive powder
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Electron Beam Melting System

freemeltONE
Location: RUB, IC
Group: HAM
Contact: Prof. Dr.-Ing. Jan T. Sehrt
Email: ham[at]ruhr-uni-bochum[dot]de

Evaporation system

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

Evaporation systems

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Fast and gentle method to produce dry powders from a liquid or slurry

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Specifications:
- Atomized liquid is sprayed in the aspirating gas flow that is heated up to 220 °C
- Maximum spraying capacity of up to 17 mL/min
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

Fine cutting device

Isomet 5000
Specifications:
- Disc speed: 1000-5000 rpm
- Coolant systems: Integrated recirculating cooling system
- Fine cutting discs: Corundum / CBN / Diamond
- Cutting-off wheels Ø: 150mm
- Feed rate: 1.2-12.5 mm/min
- Automatic adjustment of the feed speed by Smart Cut
Application:
- Precision cutting on fine sample material
- Cutting of soft to very hard materials
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Five fume hoods with integrated Schlenk lines

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Freezer

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Glovebox

GS Glovebox GPT2
Location: RUB, ID
Group: LAT
Contact: Prof. Dr.-Ing. habil. Andreas Ostendorf
Email: sekretariat-lat[at]ruhr-uni-bochum[dot]de

Glovebox MBraun LABMASTER

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Glovebox MBraun LABSTAR

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Glovebox MBraun MB2 200b

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

High Temperature Ovens

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Application: synthesis of solid state materials
Location: RUB, NC
Group: AC10
Contact: Prof. Dr. Ulf-Peter Apfel
Email: ac1[at]rub[dot]de

High temperature tubular furnaces with various gas supply

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Specifications:
- Multiple furnaces with different gas supply
- up to 1200C
- With various detectors
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

HIP

Quintus AB Technologies QIH 9
Specifications:
- Commissioning: 2014
- Pressure medium: AR, N
- Working pressure: < 2070 bar (207 MPa) Furnace modules: 2
- I. Molybdenum furnace: dimensions: Æ 87 mm, h: 160 mm; gas: Ar, temperature: < 1400 °C; thermocouples: 2 + 4 (type B)
- II. Graphite furnace: dimensions: Æ 87 mm, h: 160 mm; gas: Ar, N; temperature: < 2000 °C; thermocouples: 2 + 4 (type C)
- Industrial applications: Powder metallurgy, aerospace, energy technology, medical technology, automotive industry
  Application:
  - compaction of powdered and encapsulated Fe alloys
  - Post processing of additively manufactured components on Ni, Ti or Fe basis
  - Integrated HIP heat treatment of SX Ni superalloys or titanium aluminides
  - Rejuvenation of turbine blades (SX Ni superalloys)
  - Rejuvenation of medical implants
  Location: RUB, ICFO
  Group: Wtech
  Contact: Prof. Dr. Sebastian Weber
  Email: lwt[at]wtech[dot]rub[dot]de

Hot embedding press

Opal 460
Specifications:
- Pressing form: Ø 50 mm / Ø 60 mm / Ø 70 mm
- closure system: sliding closure
- Temperature range: 20-200°C
- holding time: adjustable
- Cooling time: adjustable
- Max. Pressure in the mould depending on mould size: 310 bar
- Heating capacity: 4x 630 W
Application:
- Embedding of sample material
- Preparation for SEM view
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Hot plates

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

ICP PECVD system

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

ICP RIE system

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

Impregnation and incipient wetness impregnation

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Specifications:
- Simple method for catalyst preparation
- Obtain supported catalyst with this method
- Can be done in dilute solution or concentrated solution for capilar filling of the catalyst pores
- Pretreatment of the catalyst support might be needed depending on its surface properties
- Thermal treatment often needed after impregnation
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

Inert gas glovebox with resist slinger and ozone cleaner

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Lacquer spinner

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Laser Beam Melting System

AconityMIDI
Location: RUB, IC
Group: HAM
Contact: Prof. Dr.-Ing. Jan T. Sehrt
Email: ham[at]ruhr-uni-bochum[dot]de
Trump TruPrint1000
Location: RUB, IC
Group: HAM
Contact: Prof. Dr.-Ing. Jan T. Sehrt
Email: ham[at]ruhr-uni-bochum[dot]de

Laser lithography system (structure widths > 600 nm)

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Laser pattern generator

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

Laser puller

PL-2000 Sutter
Specifications: Borosilicate and Quartz Nanopipettes Production
Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de

Mask aligner

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de
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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

MBraun UNIlab plus

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Specifications: Gloveboxes equipped with utility and signal penetration allowing synthetic work and electrochemical measurements under air exclusion.
Location: RUB, NC
Group: AC3
Contact: Prof. Dr. Ulf-Peter Apfel
Email: ac1[at]rub[dot]de

MOCVD Reactor

Home-built MOCVD Reactor (nitrides)
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de
Home-built MOCVD Reactor (oxides, oxynitrides)
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de
Home-built MOCVD Reactor (sulfides)
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Molecular-beam epitaxy

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Location: RUB, NB
Group: AFP
Contact: Prof. Andreas D. Wieck
Email: lsafp[at]ruhr-uni-bochum[dot]de

Muffle furnace

LINN HIGH THERM LM-312.27
Specifications:
- controller: G 800 P
- Maximum temperature: 1340 °C
- Heating capacity: 2.8 kW
- Heating method: Resistance
- Protective gas purging (optional): Argon (max. 1.2 bar)
- Thermocouple: NiCr-Ni type K
Application:
- Suitable for heat treatment at high temperatures (>400 °C).
- Hardening: quenching and tempering (hardening and tempering)
- annealing: diffusion, normal, soft, recrystallisation, stress relief annealing
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Nanoparticle synthesis

MBraun LABstar Glovebox
Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de
Plasma cleaning unit
Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de
Schlenk lines
Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de
vacuubrand VACUULAN System
Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de

Nitrogen glove box

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

Oxidation furnaces

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

PBF-LB/M process

REALIZER SLM100A
Specifications:
- Laser: Ytterbium fibre laser (wavelength: 1076.5 nm, nominal power: 100 W, effective power: 77.4 W)
- Building platform: Ø = 120 mm, preheating up to 200 °C possible
- Available shielding gases: Ar, N2
Application:
- Processing of metallic powder materials to evaluate PBF-LB processability as well as microstructural, mechanical and chemical properties in the PBF-LB-manufactured state.
- Remelting of castings for the investigation of remotely - equilibrium solidified microstructures
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

PE-ALD Reactor

Home-built PE-ALD Reactor
Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Photolitography

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Location: RUB, NB
Group: AFP
Contact: Prof. Andreas D. Wieck
Email: lsafp[at]ruhr-uni-bochum[dot]de

Planetary Micro Mills

Pulverisette 7 premium line
Location: RUB, NC
Group: AC11
Contact: Prof. Dr. Ulf-Peter Apfel
Email: ac1[at]rub[dot]de

Plasma asher

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Plasma coating system (ICPECVD)

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Plasma enhanced chemical vapour deposition

Oxford PlasmaPro100
Location: RUB, ZGH
Group: ZGH
Contact: Dr.-Ing. Dennis Naujoks
Email: dennis[dot]naujoks[at]ruhr-uni-bochum[dot]de

Plasma etching system (ICP-RIE)

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Polisher

Phoenix 4000
Specifications:
- Max. Speed of rotation: 600 rpm
- Max. Contact pressure: 5 bar
- Pressure options: centrally or individually controlled
- Sample holder: Ø 20 mm / Ø 30 mm / Ø 40 mm / Ø 50 mm
Application:
- flat grinding of specimen material
- grinding and polishing of ground
sections
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Precipitation co-precipitation precipitation deposition

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Specifications:
- Widely used methods for catalyst preparation
- Obtain supported or unsurpported catalyst
- Catalyst properties strongly influenced by concentration, pH, rate and other synthesis parameters
- Thermal treatment often needed after impregnation
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

Preparation of catalyst coatings on various substrates

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Specifications:
- Preparation of catalyst coatings on various substrates
- Heating plate to reach substrate temperatures of over 200 °C
- Automated with custom software
Location: RUB, NBCF
Group: TECHEM
Contact: Prof. Dr. Martin Muhler
Email: ltc[at]techem[dot]rub[dot]de

Protective gas furnace

KLS 05/13
Specifications:
- Internal dimensions (mm): 200 wide x 250 deep x 140 high
- external dimensions (mm): 550 wide x 580 deep x 650 high
- Max. oven temperature: 1300°C
- continuous working temperature: 1250°C
- Nominal power: 2,5 kW
- Usable capacity: 7 litres
Application:
- annealing processes of different materials
- carrying out hardening
- Off-ageing of metallic materials
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Rapid Thermal Annealing

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Location: RUB, NB
Group: AFP
Contact: Prof. Andreas D. Wieck
Email: lsafp[at]ruhr-uni-bochum[dot]de

Reactive Ion Beam Etching

Oxford Ionfab300Plus
Location: RUB, ZGH
Group: ZGH
Contact: Dr.-Ing. Dennis Naujoks
Email: dennis[dot]naujoks[at]ruhr-uni-bochum[dot]de

Reactive Ion Etching

Oxford PlasmaPro 100
Location: RUB, ZGH
Group: ZGH
Contact: Dr.-Ing. Dennis Naujoks
Email: dennis[dot]naujoks[at]ruhr-uni-bochum[dot]de

RF plasma sputter etching

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Location: RUB, ID
Group: Nano
Contact: Prof. Dr.-Ing. Ulrich Kunze
Email: ulrich[dot]kunze[at]ruhr-uni-bochum[dot]de

Rotrotary vane pumps (vacuumbrand, Pfeiffer)

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Scribing machine

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Semiautomatic polishing machine

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Location: RUB, ZEMOS
Group: NanoEC
Contact: Prof. Dr. Kristina Tschulik
Email: nanoec[at]rub[dot]de

Sonicator-bath

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Location: RUB, NC
Group: IMC
Contact: Prof. Dr. Anjana Devi
Email: anjana[dot]devi[at]rub[dot]de

Sono-Tek Coating System

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Application: preparation of membrane electrode assemblies and gas diffusion electrodes
Location: RUB, NC
Group: AC1
Contact: Prof. Dr. Ulf-Peter Apfel
Email: ac1[at]rub[dot]de

Sulfidation and Reduction System

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Specifications: Tube furnace with gas switch (H22S)
Application: sulfidation and reduction reactions
Location: RUB, NC
Group: AC9
Contact: Prof. Dr. Ulf-Peter Apfel
Email: ac1[at]rub[dot]de

Synthesis and Growth of crystals

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Specifications: Laboratory capacities for the synthesis and growth of crystals from aqueous and hydrothermal solutions
Location: RUB, IA
Group: Kristall
Contact: Prof. Dr. Jürgen Schreuer
Email: carla[dot]werner[at]rub[dot]de

Tempering equipment

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

Tube furnace

Gero-Carbolite
Specifications:
- Maximum temperature 1600 °C / 1350 °C
- Heating rate: 6 K/min / 10 K/min
- Diameter: 40 mm / 50 mm
Application:
- Heat treatment in vacuum or under protective or reactive gases
- Measurement of melt contact angles
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Vacuum chamber furnace

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Specifications:
- Operating temperature: max. 1600 °C
- Pressure range: 10 E-3 to 6000 mbar
- Furnace chamber: 260x260x260 mm (LxWxH)
- Batch weight: max. 50 kg
Application: Heat treatments, sinter curtains and liquid phase sintering
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Vacuum drop furnace

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Specifications:
- Vacuum: high vacuum - approx. 10-4 mbar
- temperatures: up to 1300 °C
- Sample size: approx. 50 mm * 50 mm * 50 mm
Application: Vacuum heat treatment with water quenching
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Vibropolisher

Saphir Vibro
Specifications: Manufacturer: QATM GmbH
- Connected load: 0.25 kVA
- Drive power: 135 VA
- Mains connection: 220-240 V 50/60 Hz (1Ph/N/PE) 100-120 V 50/60 Hz (1Ph/N/PE)
- WxHxD: 510x300x590 mm
- Weight (depending on version) : ~ 45 kg
- Inner diameter (tub): 308 mm
- Diameter (polishing cloth): 300 mm / 305 mm (12")
Application: Preparation method for examinations such as EBSD, AFM or micro/nano hardness testing, where value is placed on a deformation-free final polish. Final polishing of very soft and ductile materials such as titanium, copper, Ni-based materials or aluminium.
Location: RUB, ICFO
Group: Wtech
Contact: Prof. Dr. Sebastian Weber
Email: lwt[at]wtech[dot]rub[dot]de

Wafer saws

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Location: RUB, ID
Group: MST
Contact: Prof. Dr.-Ing. Martin Hoffmann
Email: martin[dot]hoffmann-mst[at]rub[dot]de

static Example

Additive Manufacturing

Advanced Silicon Etching

Coater

- Ruhr-Universität Bochum

Production

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